JPH0731146Y2 - 光源用冷却ホルダ - Google Patents
光源用冷却ホルダInfo
- Publication number
- JPH0731146Y2 JPH0731146Y2 JP9629589U JP9629589U JPH0731146Y2 JP H0731146 Y2 JPH0731146 Y2 JP H0731146Y2 JP 9629589 U JP9629589 U JP 9629589U JP 9629589 U JP9629589 U JP 9629589U JP H0731146 Y2 JPH0731146 Y2 JP H0731146Y2
- Authority
- JP
- Japan
- Prior art keywords
- light source
- cooling water
- cooling
- metal cylinder
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 title claims description 25
- 239000000498 cooling water Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 229910052724 xenon Inorganic materials 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 9
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 9
- 229910052742 iron Inorganic materials 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 3
- 150000003736 xenon Chemical class 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9629589U JPH0731146Y2 (ja) | 1989-08-17 | 1989-08-17 | 光源用冷却ホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9629589U JPH0731146Y2 (ja) | 1989-08-17 | 1989-08-17 | 光源用冷却ホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0335439U JPH0335439U (en]) | 1991-04-08 |
| JPH0731146Y2 true JPH0731146Y2 (ja) | 1995-07-19 |
Family
ID=31645507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9629589U Expired - Lifetime JPH0731146Y2 (ja) | 1989-08-17 | 1989-08-17 | 光源用冷却ホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731146Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5055632B2 (ja) * | 2006-09-01 | 2012-10-24 | 株式会社ニコン | 放電ランプ、光源装置、露光装置、及び露光装置の製造方法 |
| JP2009081912A (ja) * | 2007-09-25 | 2009-04-16 | Sawata Kenzaisha:Kk | 防災検知器の配線コード止着用金具 |
-
1989
- 1989-08-17 JP JP9629589U patent/JPH0731146Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0335439U (en]) | 1991-04-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |